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오일 디퓨전 펌프 Oil Diffusion Pump
global kodivac network!

DPF-6Z

Floor Plan

Technical Specification
Item DPF-6Z
Pumping Speed With baffle ℓ / sec 465
Without baffle 810
Ultimate vacuum Torr(Pa)

X 10-7( X 10-5 )

Max, allowablefore pressure Torr(Pa) 1.1 X 10-1( 15 )
Oil back streamrate With baffle mg/㎠ min X 10-4
Without baffle X 10-2
Oil   DC 704
Oil capacity 340
Electric power V / Φ 220/1
Heater power W 1000
Warm-up time min 20
Cooling water flow ℓ / min ( at 20℃ ) 3
Weight Kg 20
Inlet size   VG150
Outlet size   VG50

*자료는 DC 704 기준임( Data is based on the DC 704)
Speed Curve

Features
  • 뛰어난 배기속도
  • Low Oilback stream
  • High Fore-Vaccum Pressure
  • 헬륨 누설 탐지기에 의한 정밀한 누설검사
  • 분류법에 의한 Jet의 설계로 Oil의 오염을 제거
  • Baffle의 장착으로 Backing System Oil 손실을 방지
  • High pumping speed
  • High fore-vaccum pressure
  • Precise leak test by Helium leak detector
  • Removal of fluid pollution by jet designing of fraction
  • Protection from oil less of backing system by foreline baffle